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Issue Date Title / Author(s) / CitationFileAltmetrics
2019-10
Design and Fabrication of Silicon Nanowire-based MEMS Microphones

Lee, Seunghyun; Chang, Bobaro; Kim, Taeyup; Jin, Ailian; Cho, Dong-il Dan

2019 19TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2019), pp.1685-1688

DOI
1

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