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Issue Date	Title / Author(s) / Citation	File	Altmetrics
2019-10	Design and Fabrication of Silicon Nanowire-based MEMS Microphones Lee, Seunghyun; Chang, Bobaro; Kim, Taeyup; Jin, Ailian; Cho, Dong-il Dan 2019 19TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2019), pp.1685-1688	DOI