S-Space

Browse

Author

Showing results 1 to 1 of 1

Issue Date	Title / Author(s) / Citation	File	Altmetrics
2022-10	Atomistic kinetic Monte Carlo simulation on atomic layer deposition of TiN thin film Kim, Sangtae; An, Hyungmin; Oh, Sangmin; Jung, Jisu; Kim, Byungjo; Nam, Sang Ki; Han, Seungwu Computational Materials Science, Vol.213, p. 111620	DOI