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Issue Date Title / Author(s) / CitationFileAltmetrics
2002-03
Residual Stress Evolution in Dielectric Thin Films Prepared from Poly(methylsilsesquioxane) Precursor

Oh, Weontae; Shin, Tae Joo; Ree, Moonhor; Jin, Moon Young; Char, Kookheon

Macromol. Chem. Phys. 2002, 203, 801

DOI
1

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