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Issue DateTitle / Author(s) / CitationFileAltmetrics
2009-12
A virtual metrology system for semiconductor manufacturing

Kang, Pilsung; Lee, Hyoung-joo; Cho, Sungzoon; Kim, Dongil; Park, Chan-Kyoo; Doh, Seungyong; Park, Jinwoo

EXPERT SYSTEMS WITH APPLICATIONS; Vol.36 10; 12554-12561

DOI
1