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Issue Date Title / Author(s) / CitationFileAltmetrics
2007-12
Density variation of nanoscale patterns in thermal nanoimprint lithography

Woo, Young Seok; Kim, Jae Kwan; Lee, Dong Eon; Suh, Kahp Y.; Lee, Woo Il

Appl. Phys. Lett. 91, 253111 (2007)

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