Development of nano-manipulation system and its in-situ applications

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dc.description학위논문 (박사)-- 서울대학교 대학원 : 재료공학부, 2014. 8. 김영운.-
dc.description.abstractIn terms of physical actions inside electron microscopes, such as scanning electron microscope (SEM), focused ion beam (FIB), and transmission electron microscope (TEM), manipulation enables to conduct micro- and nano-scale positioning, assembly, and handling, which means series of process in approaching, aligning, and contacting to an object by a certain tool linked with a manipulator. With the increased attention to the in-situ measurement and observation of the properties of micro- and nano-scale materials, and the manipulation of these materials into working distance, micro- and nano-manipulating system has become increasingly important and is still a challenging task in the field of material engineering.
Among a variety of manipulation tools in use, grippers could be useful for manipulating micro- and nano-scale materials, which allow the materials to be applied to larger and opposing forces making pick-up easier and manipulate more readily without electron beam deposition leading to contamination or damage for the materials. Up to now, various grippers have been fabricated with different specifications and abilities by research groups, while most are designed for picking up objects with sized from a few tens to a few hundreds of microns. This means the grippers are for SEM-based analysis, not compatible with TEM.
In this study, we developed two kinds of manipulation tools. First, a XYZ-axis manipulation system capable of fine-positioning was built inside SEM, which is consisted of manual axis-stages and pico-motorized piezo-actuators.
Second, based on the home-made in-situ electrical probing TEM holder and the simple and compact gripping-tensile stage, we developed a novel in-situ nano-gripping TEM holder which is compatible to ordinary TEMs. This holder fulfills functions in gripping a nano-sized material as well as applying tensile or compressive force to the material. One piezotube and two piezostacks were used as actuators responsible for all movements of the gripper. The gripper tip was made from W (tungsten) wire and its tip-ends (end-effectors) was manufactured by electrochemical etching and FIB processing.
In order to confirm the applicability of these manipulation tools, experiments to measure the mechanical characteristics of a steel material were conducted inside SEM and TEM. The XYZ-axis manipulation system was utilized as in-situ bending test system. Measurement of Youngs modulus from single crystalline cementite along [100] and [001] orientations was carried out inside SEM. Experimentally measured modulus showed some deviation from theoretically calculated modulus by the reported elastic constants.
The in-situ nano-gripping TEM holder was applied to in-situ tensile test of pearlitic microstructure consisted of ferrite and cementite layers in order to investigate its fracture behavior. We observed that the fracture of the pearlitic microstructure by uniaxial tensile strain was occurred by slip plane formation and subsequent necking in ferrite layer.
By applying the manufactured manipulation tools to actual experiments for measurement of the mechanical properties, the stability and functionality of the operation of the tools were verified. In the case of the XYZ-axis manipulation system, it is considered that its usability is further increased through the combination of additional measurable or manipulating tools. Development of the in-situ nano-gripping TEM holder is the first attempt not existing previously and we believe that it is new meaningful result in that the functions capable of gripping, pushing, and pulling a nano-scale object are implemented in the TEM environment.
dc.description.tableofcontentsAbstract i
Table of Contents iv
List of Tables vi
List of Figures vii

Chapter 1. Introducton 1

1. 1. Background 1
1. 1. 1. Manipulation system inside electron microscope 1
1. 1. 2. Grippers 4
1. 1. 3. In-situ transmission electron microscopy 12
1. 2. Scopes and organizations 16

Chapter 2. PART I: Manipulation system inside SEM 17

2. 1. XYZ-axis manipualtion system 17
2. 1. 1. Introdution 17
2. 1. 2. Experimental details 19
2. 1. 3. Results and discussions 23

2. 2. Bending test of single crystalline cementite 26
2. 2. 1. Introdution 26
2. 2. 2. Experimental details 28
2. 2. 3. Results and discussions 36
2. 2. 4. Sumarry 45

Chapter 3. PART II: Manipulation system inside TEM 46

3. 1. In-situ electrical probing TEM holder 46
3. 1. 1. Introdution 46
3. 1. 2. Experimental details 49
3. 1. 3. Results and discussions 57

3. 2. Gripping-tensile stage 64
3. 2. 1. Introdution 64
3. 2. 2. Experimental details 66
3. 2. 3. Results and discussions 77

3. 3. In-situ nano-gripping TEM holder 81
3. 3. 1. Introdution 81
3. 3. 2. Experimental details 84
3. 3. 3. Results and discussions 89

3. 4. Tensile test of pearlitic steel 95
3. 4. 1. Introdution 95
3. 4. 2. Experimental details 96
3. 4. 3. Results and discussions 101

Chapter 4. Conclusions 106

References 108
Abstract (in Korean) 118
dc.format.extent3505836 bytes-
dc.publisher서울대학교 대학원-
dc.subjectin-situ electron microscopy-
dc.subjectgripping-tensile stage-
dc.subjectin-situ TEM holder-
dc.subjectpiezoelectric actuator-
dc.subjectmechanical characteristics-
dc.titleDevelopment of nano-manipulation system and its in-situ applications-
dc.contributor.affiliation공과대학 재료공학부-
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
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