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Development of a novel plasma ion source with high brightness by biased extraction method : 바이어스 기법을 이용한 고휘도의 새로운 플라즈마 이온원 개발
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황용석 | - |
| dc.contributor.author | 김윤재 | - |
| dc.date.accessioned | 2009-11-16T08:00:45Z | - |
| dc.date.available | 2009-11-16T08:00:45Z | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046442 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12227 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :원자핵공학과,2006. | eng |
| dc.format.extent | xv, 171 p. | eng |
| dc.language.iso | en | - |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 고휘도 이온원 | eng |
| dc.subject | High brightness ion source | eng |
| dc.subject | 집속이온빔 | eng |
| dc.subject | Focused ion beam | eng |
| dc.subject | 이중층 | eng |
| dc.subject | Double layer | eng |
| dc.subject | 바어어스 전극 | eng |
| dc.subject | Localized discharge | eng |
| dc.subject | 국소방전 | eng |
| dc.subject | Bias electrode | eng |
| dc.subject | 플라즈마 접촉기 | eng |
| dc.subject | Plasma contactor | eng |
| dc.subject | 에미턴스 | eng |
| dc.subject | Emittance | eng |
| dc.subject | 유도결합 플라즈마 | eng |
| dc.subject | Particle-in-cell Monte-Carlo collision simulation | eng |
| dc.subject | Particle-in-cell Monte-Carlo Collision simulation. | eng |
| dc.subject | Inductively coupled plasma. | eng |
| dc.title | Development of a novel plasma ion source with high brightness by biased extraction method | eng |
| dc.title.alternative | 바이어스 기법을 이용한 고휘도의 새로운 플라즈마 이온원 개발 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 원자핵공학과 | - |
| dc.description.degree | Doctor | eng |
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