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대기압 플라즈마를 한 식각 반응기 개발 : Development of Atmospheric Pressure Plasma Etcher
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- Authors
- Advisor
- 김곤호
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 대기압 플라즈마 ; Atmospheric pressure plasma ; 유전체 격벽 방전 ; Dielectric barrier discharge ; 식각 공정 ; etch process ; 비정질 실리콘 식각 ; amorphous silicon etch
- Description
- 학위논문(석사) --서울대학교 대학원 :원자핵공학과,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043678
https://hdl.handle.net/10371/12265
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