양면 국부화 아노다이징을 이용한 절연성 산화 알루미늄 패턴 가공

Abstract

In this study, a two-face local anodization process was developed. Two-face local anodization has advantages over existing local anodization in increasing productivity and aspect ratio. Using this process, insulative aluminum oxide patterns that penetrated the base material were fabricated on 40-μm-thick aluminum foil by approaching two identical electrodes toward both sides. The electrodes were shaped with the desired design patterns via embossing. This study consists of three parts. First, the two-face local anodization system was developed. Second, a parameter study was undertaken to determine the optimum experimental conditions, as the proper applied voltage, gap between electrode and workpiece, and pulse condition were required for localization and reaction efficiency. Third, a single layer RF antenna was manufactured to verify the effectiveness of the process, and its performance was proven by PSA spectrum analyzer.