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Study on fabrication and improvement of resonance dynamics of microcantilever sensors actuated by piezoelectric PZT thick films for bio chip application : PZT 후막으로 구동되는 바이오칩용 미세감지 캔틸레버센서의 제조와 민감도 향상에 대한 연구

DC Field Value Language
dc.contributor.advisor김환-
dc.contributor.author박재홍-
dc.date.accessioned2009-11-17T23:55:12Z-
dc.date.available2009-11-17T23:55:12Z-
dc.date.copyright2006.-
dc.date.issued2006-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048705eng
dc.identifier.urihttps://hdl.handle.net/10371/12608-
dc.descriptionThesis(doctor`s)--서울대학교 대학원 :재료공학부 무기재료공학전공,2006.eng
dc.format.extent190 leaveseng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subjectPZTeng
dc.subjectcantilevereng
dc.subject캔틸레버eng
dc.subjectresonanceeng
dc.subjectMEMSeng
dc.subjectsensitivityeng
dc.subject바이오칩eng
dc.subjectPZTeng
dc.subject공진eng
dc.subjectthick filmeng
dc.subjectSensitivityeng
dc.subjectBio-MEMSeng
dc.subject기공률eng
dc.subjectporosityeng
dc.subject구동력eng
dc.subjectforceeng
dc.titleStudy on fabrication and improvement of resonance dynamics of microcantilever sensors actuated by piezoelectric PZT thick films for bio chip applicationeng
dc.title.alternativePZT 후막으로 구동되는 바이오칩용 미세감지 캔틸레버센서의 제조와 민감도 향상에 대한 연구eng
dc.typeThesis-
dc.contributor.department재료공학부 무기재료공학전공-
dc.description.degreeDoctoreng
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