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Epitaxial growth of thin GaNAs and InGaNAs layers by metalorganic chemical vapor deposition : 유기금속화학기상증착법을 이용한 GaNAs, InGaNAs의 단결정 박막성장
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- Authors
- Advisor
- 윤의준
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- GaN ; GaN ; GaNAs ; GaNAs ; InGaN ; InGaN ; InGaNAs ; InGaNAs ; 유기금속화학기상증착법 ; MOCVD ; As 인입 ; As incorporation ; TBA ; TBA ; 사파이어 ; sapphire ; AFM ; AFM ; TEM ; TEM ; SIMS ; SIMS
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055813
https://hdl.handle.net/10371/12672
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