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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Material Science and Engineering (재료공학부)
Theses (Ph.D. / Sc.D._재료공학부)
Degradation analysis of MEMS device under cyclic loading for reliability-aided design
신뢰성 기반 설계를 위한 MEMS 소자의 반복구동에 따른 열화 해석
- Authors
- 김종진
- Advisor
- 권동일
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS; microelectromechanical systems (MEMS); 신뢰성; reliability; 열화; degradation; 반복구동; cyclic loading; 고장물리; physics-of-failure; 신뢰성통계; reliability statistics; 실리콘; silicon; 니켈; nickel
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052252
https://hdl.handle.net/10371/12696
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