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Electron-beam projection nanopatterning using crystalline lattice images : : 결정 격자 이미지를 이용한 전자빔 투사 방식의 나노패터닝
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 김병성 | - |
| dc.date.accessioned | 2009-11-18T02:26:30Z | - |
| dc.date.available | 2009-11-18T02:26:30Z | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050047 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12742 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005. | eng |
| dc.format.extent | xxiv, 209 p. | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 나노리소그래피 | eng |
| dc.subject | nanolithography | eng |
| dc.subject | 전자빔 리소그래피 | eng |
| dc.subject | electron-beam lithography | eng |
| dc.subject | atomic image projection electron-beam lithography | eng |
| dc.subject | atomic image projection electron-beam lithography | eng |
| dc.subject | 고분해능 이미지 | eng |
| dc.subject | high-resolution image | eng |
| dc.subject | 투과전자현미경 | eng |
| dc.subject | transmission electron microscopy | eng |
| dc.subject | 전자빔 레지스트 | eng |
| dc.subject | electron-beam resist | eng |
| dc.title | Electron-beam projection nanopatterning using crystalline lattice images : | eng |
| dc.title | atomic Image Projection Electron-beam Lithography (AIPEL) | eng |
| dc.title.alternative | 결정 격자 이미지를 이용한 전자빔 투사 방식의 나노패터닝 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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