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(A)Study on the mixed metal catalyst for MILC and MILC poly-Si TFTs : 금속유도측면결정화 및 TFT 특성 향상을 위한 혼합 금속 촉매에 대한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 주승기 | - |
dc.contributor.author | 윤여건 | - |
dc.date.accessioned | 2009-11-18T02:52:19Z | - |
dc.date.available | 2009-11-18T02:52:19Z | - |
dc.date.copyright | 2004. | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000053919 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/12787 | - |
dc.description | Thesis (doctoral)--서울대학교 대학원 :재료공학부,2004. | eng |
dc.format.extent | xiv, 131 leaves, iv | eng |
dc.language.iso | en | eng |
dc.publisher | 서울대학교 대학원 | eng |
dc.subject | 다결정 실리콘 | eng |
dc.subject | Polycrystalline silicon | eng |
dc.subject | 금속 유도 측면 결정화 (MILC) | eng |
dc.subject | Metal-induced lateral crystallization (milc) | eng |
dc.subject | 혼합 금속 | eng |
dc.subject | Catalyst | eng |
dc.subject | 수소 | eng |
dc.subject | Mixed metal | eng |
dc.subject | 비정질 실리콘 | eng |
dc.subject | Hydrogen | eng |
dc.subject | 박막 트랜지스터 | eng |
dc.subject | Pecvd a-si:h | eng |
dc.subject | 촉매 반응 | eng |
dc.subject | Thin film transistor (tft) | eng |
dc.title | (A)Study on the mixed metal catalyst for MILC and MILC poly-Si TFTs | eng |
dc.title.alternative | 금속유도측면결정화 및 TFT 특성 향상을 위한 혼합 금속 촉매에 대한 연구 | eng |
dc.type | Thesis | - |
dc.contributor.department | 재료공학부 | - |
dc.description.degree | Doctor | eng |
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