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Control of texture and optical properties of ZnO films fabricated by ICP asssited CVD : 유도결합 플라즈마 화학 기상 증착법을 이용한 ZnO 박막의 texure 조절 및 광학적 특성 평가

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dc.contributor.advisor이정중-
dc.contributor.author남경희-
dc.date.accessioned2009-11-18T03:37:20Z-
dc.date.available2009-11-18T03:37:20Z-
dc.date.copyright2009.-
dc.date.issued2009-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038121eng
dc.identifier.urihttps://hdl.handle.net/10371/12888-
dc.descriptionThesis(doctors) --서울대학교 대학원 :재료공학부,2009.8.eng
dc.format.extent90 leaveseng
dc.language.isoen-
dc.publisher서울대학교 대학원eng
dc.subjectZnO 박막eng
dc.subjectZnO thin filmeng
dc.subject우선 방위eng
dc.subjectpreferred orientation (PO)eng
dc.subject표면 거칠기eng
dc.subjectsurface roughnesseng
dc.subject표면 형상eng
dc.subjectsurface morphologyeng
dc.subject다중반사eng
dc.subjectmultiple reflectioneng
dc.subjecthaze factoreng
dc.titleControl of texture and optical properties of ZnO films fabricated by ICP asssited CVDeng
dc.title.alternative유도결합 플라즈마 화학 기상 증착법을 이용한 ZnO 박막의 texure 조절 및 광학적 특성 평가eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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