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(The)Redox reaction in Cu oxide formation and the in-situ formation of capping layer in Cu CMP : 구리 화학적 기계적 연마 중 구리 산화막 형성 및 캡핑막 형성 관련 산화 환원 반응
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- Authors
- Advisor
- 김재정
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- Cu ; 구리 ; interconnection ; 배선 ; CMP ; CMP ; oxidizer ; 산화제 ; complexing agent ; 착물형성제 ; OH 라디칼 ; OH radical ; 갈산 ; gallic acid ; 치환반응 ; Ag displacement ; Ag 캡핑막 ; capping layer
- Description
- Thesis(doctors) --서울대학교 대학원 :화학생물공학부, 2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041637
https://hdl.handle.net/10371/13009
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