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EUV absorber로 사용되는 TaN 막질의 식각특성 및 TaN 패턴 측벽각도가 EUVL에 미치는 영향

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Authors
장일용
Advisor
문상흡
Issue Date
2008
Publisher
서울대학교 대학원
Keywords
EUVLEUVL마스크maskabsorberabsorberTaNTaN플라즈마Plasma패러데이 상자Faraday cage전산모사Simulation
Description
학위논문(석사) --서울대학교 대학원 :화학생물공학부,2008.2.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039721

http://hdl.handle.net/10371/13100
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Theses (Master's Degree_화학생물공학부)
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