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Growth and characterization of high-k SrTiO₃thin films grown by atomic layer deposition : 원자층 증착법을 이용한 고유전 SrTiO₃박막의 성장과 특성 분석

DC Field Value Language
dc.contributor.advisor황철성-
dc.contributor.author이상운-
dc.date.accessioned2009-11-18T06:15:35Z-
dc.date.available2009-11-18T06:15:35Z-
dc.date.copyright2009.-
dc.date.issued2009-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000035983eng
dc.identifier.urihttps://hdl.handle.net/10371/13195-
dc.descriptionThesis(doctors) --서울대학교 대학원 :재료공학부,2009.2.eng
dc.format.extentxi, 150 p.eng
dc.language.isoen-
dc.publisher서울대학교 대학원eng
dc.subjectSrTiO3eng
dc.subjectSrTiO3eng
dc.subject고유전체eng
dc.subjecthigh-keng
dc.subject원자층 증착법eng
dc.subjectAtomic layer deposition (ALD)eng
dc.subjectseed layereng
dc.subjectseed layereng
dc.subject결정화eng
dc.subjectcrystallizationeng
dc.subject누설 전류eng
dc.subjectleakage currenteng
dc.subject산화제eng
dc.subjectoxidanteng
dc.subject물eng
dc.subjectH2Oeng
dc.subject오존eng
dc.subjectO3eng
dc.subject단차 피복성eng
dc.subjectstep coverageeng
dc.subject디램eng
dc.subjectDRAMeng
dc.subject커패시터eng
dc.subjectcapacitoreng
dc.titleGrowth and characterization of high-k SrTiO₃thin films grown by atomic layer depositioneng
dc.titleby Sang Woon Lee.eng
dc.title.alternative원자층 증착법을 이용한 고유전 SrTiO₃박막의 성장과 특성 분석eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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