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(A) study on electrical contact behavior and reliability of metal thin-film contacts for RF MEMS switches : RF MEMS 스위치를 위한 금속 박막 접촉의 전기적 접촉 거동 및 신뢰성 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주영창 | - |
| dc.contributor.author | 권혁 | - |
| dc.date.accessioned | 2009-11-18T06:18:03Z | - |
| dc.date.available | 2009-11-18T06:18:03Z | - |
| dc.date.copyright | 2008. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041531 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13203 | - |
| dc.description | Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8. | eng |
| dc.format.extent | x, 149 leaves. | eng |
| dc.language.iso | en | - |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | RF MEMS 스위치 | eng |
| dc.subject | electrical contact | eng |
| dc.subject | 접촉 금속 박막 | eng |
| dc.subject | RF MEMS switch | eng |
| dc.subject | 접촉 저항 | eng |
| dc.subject | contact resistance | eng |
| dc.subject | 신뢰성 | eng |
| dc.subject | contact force | eng |
| dc.subject | reliability | eng |
| dc.subject | gold | eng |
| dc.subject | platinum | eng |
| dc.subject | iridium | eng |
| dc.subject | piezoelectric actuator | eng |
| dc.title | (A) study on electrical contact behavior and reliability of metal thin-film contacts for RF MEMS switches | eng |
| dc.title.alternative | RF MEMS 스위치를 위한 금속 박막 접촉의 전기적 접촉 거동 및 신뢰성 연구 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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