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Fabrication of nano-scale molds using room-temperaure imprint lithography(RTIL) : 상온 임프린트 리소그래피를 이용한 나노몰드 제작
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이홍희 | - |
| dc.contributor.author | 김지성 | - |
| dc.date.accessioned | 2009-11-18T08:07:40Z | - |
| dc.date.available | 2009-11-18T08:07:40Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000044001 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13470 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :화학생물공학부,2007. | eng |
| dc.format.extent | vi, 29 p. | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 상온 임프린트 | eng |
| dc.subject | RTIL(room-temperature imprint lithography) | eng |
| dc.subject | 박막 | eng |
| dc.subject | thin film | eng |
| dc.subject | 소성변형 | eng |
| dc.subject | plastic deformation | eng |
| dc.subject | 패턴 사이즈 감소 | eng |
| dc.subject | size reduction | eng |
| dc.subject | edge lithography | eng |
| dc.subject | edge lithography | eng |
| dc.title | Fabrication of nano-scale molds using room-temperaure imprint lithography(RTIL) | eng |
| dc.title.alternative | 상온 임프린트 리소그래피를 이용한 나노몰드 제작 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 화학생물공학부 | - |
| dc.description.degree | Master | eng |
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