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Effect of UV treatment on silsesquioxane-based films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 차국헌 | - |
| dc.contributor.author | 구형준 | - |
| dc.date.accessioned | 2009-11-18T08:10:25Z | - |
| dc.date.available | 2009-11-18T08:10:25Z | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047849 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13480 | - |
| dc.description | Thesis(master`s)--서울대학교 대학원 :화학생물공학부,2006. | eng |
| dc.format.extent | v, 34 leaves | eng |
| dc.language.iso | en | - |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 실세스퀴옥세인 | eng |
| dc.subject | silsesquioxane | eng |
| dc.subject | 저유전 물질 | eng |
| dc.subject | low-k | eng |
| dc.subject | 나노기공박막 | eng |
| dc.subject | nanoporous films | eng |
| dc.subject | 자외선 | eng |
| dc.subject | UV | eng |
| dc.subject | 패터닝 | eng |
| dc.subject | patterning | eng |
| dc.title | Effect of UV treatment on silsesquioxane-based films | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 화학생물공학부 | - |
| dc.description.degree | Master | eng |
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