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Reliability issues for high performance Cu interconnects : : 고성능구리배선 공정을 위한 신뢰성에 관한 연구 :
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 김기수 | - |
| dc.date.accessioned | 2009-11-18T22:20:13Z | - |
| dc.date.available | 2009-11-18T22:20:13Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042907 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13516 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :재료공학부,2007. | eng |
| dc.format.extent | xx, 168 p. | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 구리배선공정 | eng |
| dc.subject | copper metallization | eng |
| dc.subject | 구리 확산 | eng |
| dc.subject | copper migration | eng |
| dc.subject | 확산방지막 | eng |
| dc.subject | Cu diffusion | eng |
| dc.subject | 원자층증착법 | eng |
| dc.subject | diffusion barrier | eng |
| dc.subject | 다공성 저유전율 유전재료 | eng |
| dc.subject | atomic layer deposition (ALD) | eng |
| dc.subject | WNxCy | eng |
| dc.subject | low-k dielectric | eng |
| dc.subject | SiOCH | eng |
| dc.subject | nucleation and growth | eng |
| dc.subject | initial transient region of ALD | eng |
| dc.subject | plasma treatment | eng |
| dc.subject | pore sealing | eng |
| dc.subject | Cu | eng |
| dc.subject | SiO2 | eng |
| dc.subject | WNxCy | eng |
| dc.subject | SiOCH | eng |
| dc.subject | capacitance-voltage (C-V) measurement | eng |
| dc.subject | transmission electron microscopy (TEM) | eng |
| dc.subject | barrier performance | eng |
| dc.title | Reliability issues for high performance Cu interconnects : | eng |
| dc.title | characterization of Cu migration through dielectric materials and the atomic layer deposited transition metal nitride diffusion barrier | eng |
| dc.title | 유전체로의 구리의 확산과 원자층 증착법을 이용한 전이금속질화물 확산 방지막에 대한 연구 | eng |
| dc.title.alternative | 고성능구리배선 공정을 위한 신뢰성에 관한 연구 : | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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