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응력이 인가된 PZT 막의 제조와 특성 평가 : Fabrication and evaluation of the stress induced PZT films
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김현이 | - |
dc.contributor.author | 이재웅 | - |
dc.date.accessioned | 2009-11-18T22:22:52Z | - |
dc.date.available | 2009-11-18T22:22:52Z | - |
dc.date.copyright | 2008. | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041528 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/13522 | - |
dc.description | 학위논문(박사) --서울대학교 대학원 :재료공학부,2008.8. | eng |
dc.format.extent | xii, 124 leaves. | eng |
dc.language.iso | en | eng |
dc.publisher | 서울대학교 대학원 | eng |
dc.subject | Piezoelectric | eng |
dc.subject | Piezoelectric | eng |
dc.subject | Ferroelectric | eng |
dc.subject | Ferroelectric | eng |
dc.subject | PZT film | eng |
dc.subject | PZT film | eng |
dc.subject | Sputtering | eng |
dc.subject | Sputtering | eng |
dc.subject | Sol-gel | eng |
dc.subject | Sol-gel | eng |
dc.subject | Residual stress | eng |
dc.subject | Residual stress | eng |
dc.subject | Free-standing film | eng |
dc.subject | Free-standing film | eng |
dc.title | 응력이 인가된 PZT 막의 제조와 특성 평가 | eng |
dc.title.alternative | Fabrication and evaluation of the stress induced PZT films | eng |
dc.type | Thesis | - |
dc.contributor.department | 재료공학부 | - |
dc.description.degree | Doctor | eng |
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