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응력이 인가된 PZT 막의 제조와 특성 평가 : Fabrication and evaluation of the stress induced PZT films

DC Field Value Language
dc.contributor.advisor김현이-
dc.contributor.author이재웅-
dc.date.accessioned2009-11-18T22:22:52Z-
dc.date.available2009-11-18T22:22:52Z-
dc.date.copyright2008.-
dc.date.issued2008-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041528eng
dc.identifier.urihttps://hdl.handle.net/10371/13522-
dc.description학위논문(박사) --서울대학교 대학원 :재료공학부,2008.8.eng
dc.format.extentxii, 124 leaves.eng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subjectPiezoelectriceng
dc.subjectPiezoelectriceng
dc.subjectFerroelectriceng
dc.subjectFerroelectriceng
dc.subjectPZT filmeng
dc.subjectPZT filmeng
dc.subjectSputteringeng
dc.subjectSputteringeng
dc.subjectSol-geleng
dc.subjectSol-geleng
dc.subjectResidual stresseng
dc.subjectResidual stresseng
dc.subjectFree-standing filmeng
dc.subjectFree-standing filmeng
dc.title응력이 인가된 PZT 막의 제조와 특성 평가eng
dc.title.alternativeFabrication and evaluation of the stress induced PZT filmseng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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