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Silicide induced lateral crystallization : 실리사이드에 의한 측면 결정화에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주승기 | - |
| dc.contributor.author | 송남규 | - |
| dc.date.accessioned | 2009-11-18T22:28:25Z | - |
| dc.date.available | 2009-11-18T22:28:25Z | - |
| dc.date.copyright | 2008. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039481 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13535 | - |
| dc.description | Thesis(doctors)--서울대학교 대학원 :재료공학부,2008.2. | eng |
| dc.format.extent | xii, 109 leaves | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 금속유도측면결정화 (MILC) | eng |
| dc.subject | metal-induced lateral crystallization (MILC) | eng |
| dc.subject | 다결정질 실리콘 (poly-Si) | eng |
| dc.subject | polycrystalline silicon (poly-Si) | eng |
| dc.subject | 박막 트랜지스터 (thin film transistor | eng |
| dc.subject | thin film transistor (TFT) | eng |
| dc.subject | TFT) | eng |
| dc.subject | silicide seed | eng |
| dc.subject | 실리사이드 씨앗 (silicide seed) | eng |
| dc.subject | Pd | eng |
| dc.subject | 팔라듐 (Pd) | eng |
| dc.subject | tensile stress effect | eng |
| dc.subject | 인장 응력 효과 (tensile stress effect) | eng |
| dc.title | Silicide induced lateral crystallization | eng |
| dc.title.alternative | 실리사이드에 의한 측면 결정화에 관한 연구 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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