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Electron-beam projection nanopatterning using crystal lattice images obtained from high resolution transmission electron microscopy : 고분해능 투과전자현미경의 결정격자 이미지를 이용한 전자빔 나노패터닝에 관한 연구
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- Authors
- Advisor
- 김기범
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 나노리소그래피 ; nanolithography ; 전자빔 리소그래피 ; electron-beam lithography ; atomic image projection electron-beam lithography ; atomic image projection electron-beam lithography ; 고분해능 투과전자 현미경 ; high resolution transmission electron microscopy ; HSQ 레지스트 ; high density e-beam pattering ; hydrogen silsesquioxane resist
- Description
- Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041520
https://hdl.handle.net/10371/13538
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