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저온?고속증착을 위해 고안된 스퍼터링 공정 및 제조된 광촉매성 TiO₂ 박막의 특성 연구 : Low temperature TiO2 deposition by reactive ICP-sputtering and the photo-catalytic ability of TiO2
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- Authors
- Advisor
- 이정중
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- TiO2 ; TiO2 ; 광촉매 ; photo-catalytic ; 반응성 스퍼터링 ; Reactive sputtering ; 유도결합플라즈마 ; Target voltage control ; high deposition rate ; Inductively coupled plasma ; low temperature deposition
- Description
- 학위논문(박사) --서울대학교 대학원 :재료공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042919
https://hdl.handle.net/10371/13588
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