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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Material Science and Engineering (재료공학부)
Theses (Ph.D. / Sc.D._재료공학부)
ULSI용 구리배선에서의 도금공정 및 전기화학적 특성 분석
A study on the electroplating process and electrochemical characteristics for Cu interconnect
- Authors
- 이의형
- Advisor
- 강탁
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 도금; electroplating; damascene; damascene; superfilling; superfilling; 유기 첨가제; additives; 부식; corrosion; self anneal; self anneal
- Description
- 학위논문(박사) --서울대학교 대학원 :재료공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042934
http://hdl.handle.net/10371/13593
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