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ULSI용 구리배선에서의 도금공정 및 전기화학적 특성 분석
A study on the electroplating process and electrochemical characteristics for Cu interconnect

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Authors
이의형
Advisor
강탁
Issue Date
2007
Publisher
서울대학교 대학원
Keywords
도금electroplatingdamascenedamascenesuperfillingsuperfilling유기 첨가제additives부식corrosionself annealself anneal
Description
학위논문(박사) --서울대학교 대학원 :재료공학부,2007.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042934

http://hdl.handle.net/10371/13593
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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