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열 필라멘트법에 의한 다이아몬드와 다결정 실리콘 박막의 화학 기상 증착
Chemical vapor deposition of diamond and poly-Si thin films by hot filament method

DC Field Value Language
dc.contributor.advisor김도연-
dc.contributor.author신승도-
dc.date.accessioned2009-11-19T05:06:04Z-
dc.date.available2009-11-19T05:06:04Z-
dc.date.copyright2003.-
dc.date.issued2003-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059792eng
dc.identifier.urihttps://hdl.handle.net/10371/13638-
dc.description학위논문(박사)--서울대학교 대학원 :재료공학부,2003.eng
dc.format.extent1 책 (면수복잡)eng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subjectHot filament CVDeng
dc.subject열 필리멘트법eng
dc.subjectDiamondeng
dc.subject다이아몬드eng
dc.subjectCharged cluster modeleng
dc.subject전하를 띤 클러스터 모델eng
dc.subjectpoly-Sieng
dc.subject다결정 실리콘eng
dc.subjectTwineng
dc.subject쌍정eng
dc.title열 필라멘트법에 의한 다이아몬드와 다결정 실리콘 박막의 화학 기상 증착eng
dc.title.alternativeChemical vapor deposition of diamond and poly-Si thin films by hot filament methodeng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
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