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열 필라멘트법에 의한 다이아몬드와 다결정 실리콘 박막의 화학 기상 증착 : Chemical vapor deposition of diamond and poly-Si thin films by hot filament method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김도연 | - |
| dc.contributor.author | 신승도 | - |
| dc.date.accessioned | 2009-11-19T05:06:04Z | - |
| dc.date.available | 2009-11-19T05:06:04Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059792 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13638 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :재료공학부,2003. | eng |
| dc.format.extent | 1 책 (면수복잡) | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | Hot filament CVD | eng |
| dc.subject | 열 필리멘트법 | eng |
| dc.subject | Diamond | eng |
| dc.subject | 다이아몬드 | eng |
| dc.subject | Charged cluster model | eng |
| dc.subject | 전하를 띤 클러스터 모델 | eng |
| dc.subject | poly-Si | eng |
| dc.subject | 다결정 실리콘 | eng |
| dc.subject | Twin | eng |
| dc.subject | 쌍정 | eng |
| dc.title | 열 필라멘트법에 의한 다이아몬드와 다결정 실리콘 박막의 화학 기상 증착 | eng |
| dc.title.alternative | Chemical vapor deposition of diamond and poly-Si thin films by hot filament method | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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