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수소 플라즈마가 금속 유도 측면 결정화에 미치는 효과에 관한 연구 : (A)Study on hydrogen plasma treatment effect on the metal-induced-lateral crystallization
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- Authors
- Advisor
- 주승기
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 금속 유도 측면 결정화 ; metal induced lateral crystallization ; 수소 플라즈마 ; Hydrogen plasma ; 박막트랜지스터 ; TFT(thin film transistor) ; 누설전류 ; leakage current
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051060
https://hdl.handle.net/10371/14287
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