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In situ, real-time stress measurements during growth of thin films on (001) InP using multibeam optical stress sensor : 다중광 응력 측정 장비를 이용한 InP 기판 위의 에피 박막 응력 실시간 관찰

DC Field Value Language
dc.contributor.advisor윤의준-
dc.contributor.author김병주-
dc.date.accessioned2009-11-24T03:15:54Z-
dc.date.available2009-11-24T03:15:54Z-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051031eng
dc.identifier.urihttps://hdl.handle.net/10371/14314-
dc.descriptionThesis(master`s)--서울대학교 대학원 :재료공학부,2005.eng
dc.format.extentviii, 54 leaveseng
dc.language.isoen-
dc.publisher서울대학교 대학원eng
dc.subjectmultibeam optical stress sensor(MOSS)eng
dc.subjectmultibeam optical stress sensor (MOSS)eng
dc.subject변형률eng
dc.subjectstraineng
dc.subject실시간 응력 관찰eng
dc.subjectreal-time stress measurementeng
dc.subjectInPeng
dc.subjectInPeng
dc.subjectInGaAseng
dc.subjectInGaAseng
dc.subjectInAs 양자점(quantum dots)eng
dc.subjectInAs quantum dots (QDs)eng
dc.subjectGaAseng
dc.subjectGaAseng
dc.titleIn situ, real-time stress measurements during growth of thin films on (001) InP using multibeam optical stress sensoreng
dc.title.alternative다중광 응력 측정 장비를 이용한 InP 기판 위의 에피 박막 응력 실시간 관찰eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeMastereng
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