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Investigation of atomic and electronic structures of LaAlO3/CaTiO3 and MoS2/SiO2 interfaces by Cs-corrected STEM and EELS

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dc.contributor.advisor장호원-
dc.contributor.author손운배-
dc.date.accessioned2018-11-12T00:57:50Z-
dc.date.available2018-11-12T00:57:50Z-
dc.date.issued2018-08-
dc.identifier.other000000151975-
dc.identifier.urihttps://hdl.handle.net/10371/143168-
dc.description학위논문 (박사)-- 서울대학교 대학원 : 공과대학 재료공학부, 2018. 8. 장호원.-
dc.description.abstractHetero interfaces have a definition of interface of two different solids or liquids. Hetero interfaces are usually defined in few nanometer scale. Though their dimension is lower than nanostructures and films, hetero interfaces play a crucial role in determining electrical, magnetic, optical properties. Since interfaces are usually defined in the depth of few-nanometer scale, some analysis techniques such as x-ray diffraction (XRD), scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS) have limit to explain phenomenon at the interfaces in detail.

Transmission electron microscopy (TEM) is one of most powerful analysis techniques that facilitate the structural and chemical study of hetero interfaces. Using high voltage-accelerated electron beam, TEM makes it possible to observe the interested local area in nanoscale. Especially, spherical aberration corrected (Cs-corrected) scanning transmission electron microscopy (STEM) combined with electron energy loss spectroscopy (EELS) are the most commonly used technique to observe interfaces intuitively. These analysis methods facilitate investigating atomic arrangement of hetero interfaces, secondary interphases in case of inter diffusion, and bonding characteristics at the interfaces.

In this thesis, we applied TEM based techniques to directly observe atomic and electronic structures of hetero interfaces and their impact on electrical properties. Furthermore, we investigated the origin of the formation of interfacial structures.

First, we investigated the relationship between degrees of octahedral tilt and interfacial conductivity of perovskite heterostructures depend on the thickness of the pseudo-substrate. We compared electrical properties of LaAlO3/CaTiO3 (LAO/CTO) interfaces on SrTiO3 substrate with various thickness of CTO to find critical thickness in which metal-insulator transition occurs. Using integrated differential phase contrast (iDPC) scanning transmission electron microscopy (STEM) imaging and, we measured octahedral tilt angle of CTO film from CTO/STO interface to LAO/CTO interface to further explain thickness dependent metal-insulator transition. This work demonstrates that it is octahedral tilt angle and symmetry of perovskite structure that determines electrical property of interfacial conductivity of perovskite based hetero interfaces. To explain the relationship between electrical property and atomic structure of the LAO/CTO/STO heterostructure, first principles calculation is necessary.

Next, we directly observed atomic and electronic structures of MoS2/SiO2 interfaces. We measured inter layer distance of the MoS2 films and investigated bonding characteristics. Through this work, we verified the impact of amorphous SiO2 layer on structures of MoS2 thin films. First, atomic structure of AS-MoS2 film is affected by the SiO2 layer. Second, we confirmed the existence of S-O bonding at the interface layer using EELS. We demonstrated that even amorphous SiO2 layer gave affect the formation of MoS2 thin film in atomic and electronic structural manner. We believe that this work can explain enhanced mobility or conductivity of MoS2 when it is deposited on SiO2/Si.
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dc.description.tableofcontents1. Introduction 1

1.1. Thesis overview 1

1.2. Analysis of interface by TEM 3

1.2.1. Cs-corrected STEM 3

1.2.2. Integrated Differential Phase Contrast imaging (iDPC) 7

1.2.3. EELS (Electron Energy Loss Spectroscopy) 8

1.3. References. 10



2. Role of octahedral tilt on conductivity of perovskite hetero interfaces 12

2.1. Introduction 12

2.1.1. Transitional metal oxide in perovskite structure 12

2.1.2. Octahedral tilt of perovskites and their contribution to electronic properties of perovskite oxide thin films 15

2.1.3. Complex oxide interfaces and Two Dimensional Electron Gas (2DEG) 18

2.1.4. Motivation . 27

2.1.5. Research Goal. 34

2.2. Experimental Method. 35

2.2.1. Film growth by pulsed laser deposition method 35

2.2.2 TEM sample preparation 36

2.2.2 Film characterization. 38

2.2.3 TEM analysis . 39

2.3. Results and discussion 40

2.3.1. Characterization of LAO/CTO/STO heterostructure . 40

2.3.2. Thickness dependent atomic structure of the LAO/CTO/STO heterostructure 44

2.4. Conclusion. 55

2.5. References. 57



3. Microscopic evidence of strong interaction between chemical vapor deposited MoS2 layer and SiO2 template 60

3.1. Introduction 60

3.1.1. Structures of MoS2 62

3.2. Experimental details 64

3.2.1. MoS2 film deposition 64

3.2.3. TEM characterization 64

3.2.2. TEM sample preparation 65

3.2.4. Theoretical calculation 65

3.3. Atomic and electronic structure of MoS2/SiO2 interface 68

3.3.1. As synthesized MoS2 film 68

3.3.2. Transferred MoS2 film 71

3.3.4. Interlayer distance 72

3.3.5. Chemical composition of the MoS2 films 77

3.3.6. EELS spectra 79

3.5. References. 86



4. Summary and conclusion 90

4.1. Summary of results 90

4.2. Future works 92

4.2.1 Theoretical study of the LAO/CTO/STO heterostructure 92

4.2.2. MoS2 film on crystalline substrate 93

요약(국문 초록) 94

List of Publications 97

Curriculum vitae 102

Acknowledgements in Korean 105
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dc.language.isoen-
dc.publisher서울대학교 대학원-
dc.subject.ddc620.1-
dc.titleInvestigation of atomic and electronic structures of LaAlO3/CaTiO3 and MoS2/SiO2 interfaces by Cs-corrected STEM and EELS-
dc.typeThesis-
dc.description.degreeDoctor-
dc.contributor.affiliation공과대학 재료공학부-
dc.date.awarded2018-08-
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