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유도 결합 플라즈마(ICP) 스퍼터링법에 의한 투명 전도성 ITO 박막의 저온 증착 : Low temperature deposition of transparent conducting ITO films by Inductively Coupled Plasma-assisted DC magnetron sputtering
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- Authors
- Advisor
- 이정중
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- Indium tin oxide(ITO) ; Indium tin oxide(ITO) ; 유도결합 플라즈마(ICP) ; Inductively coupled plasma(ICP) ; 마그네트론 스퍼터링 ; sputtering
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051028
https://hdl.handle.net/10371/14345
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