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ESPI를 이용한 MEMS용 재료의 기계적물성의 온도 의존성 평가
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- Authors
- Advisor
- 권동일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- ESPI(Electronic Speckle Pattern Interferometry) ; Espi(electronic speckle pattern interferometry) ; MEMS ; Mems ; 열팽창계수 ; Thermal expansion coefficient ; 탄성계수 ; Elastic modulus ; 온도 의존성 ; Temperature-dependency
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055536
https://hdl.handle.net/10371/14361
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