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미세소자의 물성평가를 위한 나노압입시험기의 machine compliance 보정
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- Authors
- Advisor
- 권동일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 나노연속압입시험 ; Nanoindentation ; 압입하중변위곡선 ; Load-depth curve ; machine compliance ; Machine compliance ; thermal drift ; Pile-up ; pile-up ; Tip blunting ; tip blunting depth ; Contact area ; 압입접촉면적
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054516
https://hdl.handle.net/10371/14366
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