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The dynamics of electron beam scattering on metal membranes: nanopore formation in metal membranes using transmission electron microscopy

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dc.contributor.authorKim, Hyun-Mi-
dc.contributor.authorPark, Kyeong-Beom-
dc.contributor.authorKim, Hyung-Jun-
dc.contributor.authorChae, Hongsik-
dc.contributor.authorYu, Jae-Seok-
dc.contributor.authorLee, Kidan-
dc.contributor.authorKim, Ki-Bum-
dc.date.accessioned2019-03-11T01:38:34Z-
dc.date.available2019-03-11T10:42:57Z-
dc.date.issued2018-11-12-
dc.identifier.citationNano Convergence, 5(1):32ko_KR
dc.identifier.issn2196-5404-
dc.identifier.uri10.1186/s40580-018-0164-z-
dc.identifier.urihttps://hdl.handle.net/10371/146923-
dc.description.abstractAbstract
The dynamics of nanopore formation in metal membranes using the highly focused and high energy electron beams (e-beams) of transmission electron microscopy instruments was investigated. Various metals such as Al, Ti, Cr, Cu, and Au were selected to investigate the effect of the atomic mass of the metal on nanopore drilling, namely, elastic versus inelastic scattering. We demonstrated that the effect of elastic scattering (pore formation by sputtering) decreased as the atomic mass of the metal increased. Furthermore, experimental cross-sections obtained from normalized drilled volume vs. electron dose curves (characteristic contrast curves) matched well the calculated atomic displacement cross-sections determined from elastic scattering data. The sputtering energies of Ti, Cr, and Cu were determined to be approximately 10, 9, and 7 eV, respectively, which were in good agreement with the reported range of sputtering energy values.
ko_KR
dc.description.sponsorship1. The Nano Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT (MSIT) of Korea (2015M3A7B4050454) and (2017R1D1A1B03035058) 2. BioNano Health-Guard Research Center funded by the Ministry of Science and ICT (MSIT) of Korea as Global Frontier Project (H-GUARD_2013M3A6B2078943).ko_KR
dc.language.isoenko_KR
dc.publisherSpringer Openko_KR
dc.subjectNanopore perforationko_KR
dc.subjectFocused e-beamko_KR
dc.subjectScattering cross-sectionko_KR
dc.titleThe dynamics of electron beam scattering on metal membranes: nanopore formation in metal membranes using transmission electron microscopyko_KR
dc.typeArticleko_KR
dc.contributor.AlternativeAuthor김현미-
dc.contributor.AlternativeAuthor박경범-
dc.contributor.AlternativeAuthor김형준-
dc.contributor.AlternativeAuthor채홍식-
dc.contributor.AlternativeAuthor유재석-
dc.contributor.AlternativeAuthor이기단-
dc.contributor.AlternativeAuthor김기범-
dc.language.rfc3066en-
dc.rights.holderThe Author(s)-
dc.date.updated2018-11-18T04:26:49Z-
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Journal Papers (저널논문_재료공학부)
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