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(The) study on the crystallization behavior by the current from substrate d.c. bias voltage during sputter deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 이성호 | - |
| dc.date.accessioned | 2009-11-25 | - |
| dc.date.available | 2009-11-25 | - |
| dc.date.copyright | 2008. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041102 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/14861 | - |
| dc.description | Thesis(masters) --서울대학교 대학원 :재료공학부,2008.2. | eng |
| dc.format.extent | ix, 61 장 | eng |
| dc.language.iso | en | - |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 비정질 박막 | eng |
| dc.subject | amorphous thin film | eng |
| dc.subject | 결정화 | eng |
| dc.subject | crystallization | eng |
| dc.subject | 양극 바이어스 플라즈마 | eng |
| dc.subject | positive bias plasma | eng |
| dc.subject | Joule heating | eng |
| dc.subject | Joule heating | eng |
| dc.subject | Ge2Sb2Te5 | eng |
| dc.subject | Ge2Sb2Te5 | eng |
| dc.subject | 저마늄 | eng |
| dc.subject | Ge | eng |
| dc.title | (The) study on the crystallization behavior by the current from substrate d.c. bias voltage during sputter deposition | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Master | eng |
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