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Pd이 Ni-MILC의 결정화 거동과 TFT 특성에 효과 : Effect of Pd on crystallization behavior and TFT properties in Ni-MILC
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- Authors
- Advisor
- 주승기
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 저온폴리실리콘(Low Temperature Poly-Si; LTPS) 결정화 ; LTPS ; 폴리TFT(poly-TFT) ; MILC ; 금속 촉매 ; poly-Si TFT ; 금속측면유도결정화(Metal Induced Lateral Crystallization ; crystallization ; MILC) ; Metal Catalyst ; Ni-MILC ; Ni-MILC ; Pd-MILC ; Pd-MILC ; 박막 트랜지스터 (Thin Film Transistor ; leakage current ; TFT) ; 누설전류 (leakage current)
- Description
- 학위논문(석사) --서울대학교 대학원 :재료공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000049235
https://hdl.handle.net/10371/14882
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