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S-Space
College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Materials Science and Engineering (재료공학부)
Theses (Master's Degree_재료공학부)
SiGe으로 채워진 trench형태의 virtual substrate 형성
- Authors
- Advisor
- 윤의준
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- UHV-CVD ; UHV-CVD ; HR-TEM ; HR-TEM ; SEM ; SEM ; Si trench ; Si trench ; SiGe ; SiGe ; 전위 ; dislocation ; 결함 ; defect ; shallow trench ; shallow trench
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047516
https://hdl.handle.net/10371/14885
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TEL: 02-880-5567
Email: s-space@snu.ac.kr
