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Electrical and corrosion properties of titanium oxynitride(TiNxOy) films prepared by inductively coupled plasma assisted reactive sputtering
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- Authors
- Advisor
- 이정중
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- Titanium oxynitride ; Titanium oxynitride ; 유도결합 플라즈마 스퍼터링 ; Inductively Coupled Plasma(ICP) ; 전기적 특성 ; Electrical properties ; 부식 특성 ; Corrosion resistance
- Description
- Thesis(masters) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042156
https://hdl.handle.net/10371/14892
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