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유도결합 플라즈마 화학 기상 증착법으로 제조된 SnO₂박막의 광학적 특성평가 : Optical properties of SnO₂ films deposited by inductively coupled plasma assisted chemical vapor deposition

DC Field Value Language
dc.contributor.advisor이정중-
dc.contributor.author홍승찬-
dc.date.accessioned2009-11-25T03:19:30Z-
dc.date.available2009-11-25T03:19:30Z-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051087kor
dc.identifier.urihttps://hdl.handle.net/10371/15093-
dc.description학위논문(석사)--서울대학교 대학원 :재료공학부,2005.kor
dc.format.extentiv, 35 장kor
dc.language.isoko-
dc.publisher서울대학교 대학원kor
dc.subject유도결합 플라즈마kor
dc.subjectICP-CVDkor
dc.subject열 반사 거울 박막kor
dc.subjectSnO2kor
dc.subjectHeat-mirrorkor
dc.title유도결합 플라즈마 화학 기상 증착법으로 제조된 SnO₂박막의 광학적 특성평가kor
dc.title.alternativeOptical properties of SnO₂ films deposited by inductively coupled plasma assisted chemical vapor depositionkor
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeMasterkor
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