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(A)Study of artifacts generated during TEM sample preparation using Ion Milling and focused lon Beam : 이온 밀러 및 집속 이온 빔을 이용하여 TEM 시편 제조시 발생하는 결함에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김영운 | - |
| dc.contributor.author | 박영민 | - |
| dc.date.accessioned | 2009-11-25T03:31:22Z | - |
| dc.date.available | 2009-11-25T03:31:22Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043708 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/15132 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :재료공학부,2007. | eng |
| dc.format.extent | 54 장 | eng |
| dc.language.iso | en | - |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 투과전자현미경 | eng |
| dc.subject | TEM (Transmission Electron Microscopy) | eng |
| dc.subject | 이온밀링 | eng |
| dc.subject | Temperature | eng |
| dc.subject | 집속이온빔 | eng |
| dc.subject | Ion milling | eng |
| dc.subject | 온도 | eng |
| dc.subject | Sample Preparation | eng |
| dc.subject | TEM 시편준비법 | eng |
| dc.subject | FIB(Focused Ion beam) | eng |
| dc.subject | 플라즈마 클리너 | eng |
| dc.subject | Plasma Cleaner | eng |
| dc.title | (A)Study of artifacts generated during TEM sample preparation using Ion Milling and focused lon Beam | eng |
| dc.title.alternative | 이온 밀러 및 집속 이온 빔을 이용하여 TEM 시편 제조시 발생하는 결함에 관한 연구 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Master | eng |
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