One Step 3D Multilayer Photolithography on Low Cost Transparent Film Substrate

Abstract

Microfluidic bio-chip is very useful tool for cell biology. There are many methods for making bio-chip. Photolithography is basis of the bio-chip fabrication techniques. Photolithography is the technique which can make 3D structures using light. Due to the characteristics of the bio-chip, multilayer photolithography method is broadly used. Typical multilayer photolithography was layer-by-layer method. However it was inconvenience because of the repeated processes. Also the substrate of photolithography was generally silicon wafer but it is expensive and brittle. In this research, we offer a new fabrication method and alternative substrate. We used commercial OHP film for the substrate. It has good adhesion with SU-8 and cost-effective. Using the OHP film, we developed a novel photolithography method which can make complex 3D structures with only one step without several steps and masks. With this method, we made mold for making microfluidic devices.