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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Mechanical Aerospace Engineering (기계항공공학부)
Theses (Master's Degree_기계항공공학부)
큰 종횡비를 가지는 홀에서의 백색광 간섭계 적용에 관한 연구 : Interference Microscopy for High Aspect-Ratio Via Measurement
- Authors
- Advisor
- 박희재
- Major
- 기계항공공학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- Interferometer ; TSV ; Via measurement ; Telecentric
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 기계항공공학부, 2011.2. 박희재.
- Language
- kor
- URI
- https://hdl.handle.net/10371/157391
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029822
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