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큰 종횡비를 가지는 홀에서의 백색광 간섭계 적용에 관한 연구
Interference Microscopy for High Aspect-Ratio Via Measurement

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Authors
이기훈
Advisor
박희재
Major
기계항공공학부
Issue Date
2011-02
Publisher
서울대학교 대학원
Keywords
InterferometerTSVVia measurementTelecentric
Description
학위논문 (석사)-- 서울대학교 대학원 : 기계항공공학부, 2011.2. 박희재.
Language
kor
URI
https://hdl.handle.net/10371/157391

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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Master's Degree_기계항공공학부)
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