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(A) Study for High Precision MEMS Load Cell Packaging
고정밀 MEMS 로드셀 패키징에 대한 연구

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Authors
구교범
Advisor
이정훈
Major
기계항공공학부
Issue Date
2011-02
Publisher
서울대학교 대학원
Keywords
패키징로드셀MEMS정밀유한요소해석PackagingLoad CellPrecisionFEM
Description
학위논문 (석사)-- 서울대학교 대학원 : 기계항공공학부, 2011.2. 이정훈.
Language
eng
URI
http://hdl.handle.net/10371/157406

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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Master's Degree_기계항공공학부)
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