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AFM을 이용한 유전체 박막의 전기적 특성 연구 : Electrical characterization of dielectric films using Atomic Force Microscopy

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Authors

이태권

Advisor
국양
Major
나노융합학과
Issue Date
2011-02
Publisher
서울대학교 대학원
Keywords
Atomic Force Microscopy유전체저항 스위칭 메모리TiO2ZrxHf1-xOy누설 전류.Dielectric filmsResistive Switching MemoryLeakage current.
Description
학위논문 (석사)-- 서울대학교 대학원 : 나노융합학과, 2011.2. 국양.
Language
kor
URI
https://hdl.handle.net/10371/157440

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