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The nanostructure and the tribological properties of Mo₂N-Cu nanocomposite films deposited by inductively coupled plasma assisted sputtering : 유도결합 플라즈마를 적용하여 반응성기상증착법으로 증착한 Mo2N-Cu 나노 복합물 박막의 나노구조와 마찰특성 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 김진남 | - |
| dc.date.accessioned | 2019-07-10T04:11:00Z | - |
| dc.date.available | 2019-07-10T04:11:00Z | - |
| dc.date.issued | 2011-02 | - |
| dc.identifier.other | 000000028935 | - |
| dc.identifier.uri | https://hdl.handle.net/10371/158975 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000028935 | ko_KR |
| dc.description | 학위논문 (박사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 이정중. | - |
| dc.format.extent | xiii, 136 장 | - |
| dc.language.iso | eng | - |
| dc.publisher | 서울대학교 대학원 | - |
| dc.subject | 나노복합물 | - |
| dc.subject | 유도결합플라즈마 | - |
| dc.subject | 몰리브데늄 구리 질화물 | - |
| dc.subject | 마찰특성 | - |
| dc.subject | 에너지 입사 | - |
| dc.subject | 축전기 삽입 | - |
| dc.subject | nanocomposite | - |
| dc.subject | Inductively Coupled Plasma (ICP) | - |
| dc.subject | molybdemum nitride copper | - |
| dc.subject | energy flux | - |
| dc.subject | capacitance termination | - |
| dc.subject | tribology | - |
| dc.title | The nanostructure and the tribological properties of Mo₂N-Cu nanocomposite films deposited by inductively coupled plasma assisted sputtering | - |
| dc.title.alternative | 유도결합 플라즈마를 적용하여 반응성기상증착법으로 증착한 Mo2N-Cu 나노 복합물 박막의 나노구조와 마찰특성 연구 | - |
| dc.type | Thesis | - |
| dc.type | Dissertation | - |
| dc.description.degree | Doctor | - |
| dc.contributor.affiliation | 재료공학부 | - |
| dc.date.awarded | 2011-02 | - |
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