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(A) study on fabrication technology of fully-integrated MEMS probe system for cancer detection : 암 진단용 RF 탐침 시스템 제작을 위한 MEMS 집적기술에 관한 연구

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Authors

방용승

Advisor
김용권
Major
전기. 컴퓨터공학부
Issue Date
2011-08
Publisher
서울대학교 대학원
Keywords
유전율 측정기판 집적형 도파관RF MEMS수직 신호연결Permittivity measurementsubstrate integrated waveguidevertical interconnection
Description
학위논문 (박사)-- 서울대학교 대학원 : 전기. 컴퓨터공학부, 2011.8. 김용권.
Language
eng
URI
https://hdl.handle.net/10371/159056

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