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DRAM capacitor 전기적 특성 개선을 위한 적층 구조 전극 연구 : Dielectric performance improvement in DRAM capacitors using bi-metal electrodes
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황철성 | - |
| dc.contributor.author | 한소라 | - |
| dc.date.accessioned | 2019-07-10T05:11:16Z | - |
| dc.date.available | 2019-07-10T05:11:16Z | - |
| dc.date.issued | 2011-08 | - |
| dc.identifier.other | 000000031636 | - |
| dc.identifier.uri | https://hdl.handle.net/10371/159521 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031636 | ko_KR |
| dc.description | 학위논문 (석사)-- 서울대학교 대학원 : 재료공학부(하이브리드 재료), 2011.8. 황철성. | - |
| dc.format.extent | xi, 98 p. | - |
| dc.language.iso | kor | - |
| dc.publisher | 서울대학교 대학원 | - |
| dc.subject | ALD | - |
| dc.subject | Ru | - |
| dc.subject | Ir | - |
| dc.subject | Pt | - |
| dc.subject | 합전극 | - |
| dc.subject | MIM capacitor | - |
| dc.subject | 일함수 | - |
| dc.title | DRAM capacitor 전기적 특성 개선을 위한 적층 구조 전극 연구 | - |
| dc.title.alternative | Dielectric performance improvement in DRAM capacitors using bi-metal electrodes | - |
| dc.type | Thesis | - |
| dc.type | Dissertation | - |
| dc.description.degree | Master | - |
| dc.contributor.affiliation | 재료공학부(하이브리드 재료) | - |
| dc.date.awarded | 2011-08 | - |
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