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실리콘 웨이퍼 기판 위 잘 정렬된 박막 양극산화 알루미늄의 제조 : Fabrication of thin and well ordered nanoporous alumina on Si wafer
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 신규순 | - |
dc.contributor.author | 박만식 | - |
dc.date.accessioned | 2019-07-10T06:30:40Z | - |
dc.date.available | 2019-07-10T06:30:40Z | - |
dc.date.issued | 2011-02 | - |
dc.identifier.other | 000000030025 | - |
dc.identifier.uri | https://hdl.handle.net/10371/160226 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000030025 | ko_KR |
dc.description | 학위논문 (석사)-- 서울대학교 대학원 : 화학생물공학부, 2011.2. 신규순. | - |
dc.format.extent | vii, 53 장 | - |
dc.language.iso | kor | - |
dc.publisher | 서울대학교 대학원 | - |
dc.subject | 박막 양극산화알루미늄 | - |
dc.subject | 고분자 나노임프린트 리소그래피 | - |
dc.subject | 건식식각 | - |
dc.subject | 양극산화 | - |
dc.subject | 베리어레이어 제거 | - |
dc.subject | 금속 나노선 | - |
dc.subject | thin anodic aluminum oxide | - |
dc.subject | polymer nanoimprint lithography | - |
dc.subject | barrier layer removal | - |
dc.subject | dry etching | - |
dc.subject | anodization | - |
dc.subject | electroplating | - |
dc.title | 실리콘 웨이퍼 기판 위 잘 정렬된 박막 양극산화 알루미늄의 제조 | - |
dc.title.alternative | Fabrication of thin and well ordered nanoporous alumina on Si wafer | - |
dc.type | Thesis | - |
dc.type | Dissertation | - |
dc.description.degree | Master | - |
dc.contributor.affiliation | 화학생물공학부 | - |
dc.date.awarded | 2011-02 | - |
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