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Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step
Cited 38 time in
Web of Science
Cited 37 time in Scopus
- Authors
- Issue Date
- 2010-09
- Publisher
- Wiley - V C H Verlag GmbbH & Co.
- Citation
- Small, Vol.6 No.18, pp.1981-1985
- ISSN
- 1613-6810
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